pecvd systems
1200¡æ single heating zone CVD system with 3 gas channels

1200¡æ single heating zone CVD system with 3 gas channels

Model:KJ-1200CVD
Description:KeJia CVD tube furnace is widely used in CVD experiments;may also be used in: graphene,vacuum sintering,protective atmosphere sintering,preparation of nanophase materials, battery materials preparation,etc.
Introduction:

Features

1.Split Chamber for fast cooling and fast heating.

2.Touch screen interactive mode.

3.Uniform Temperature.

Descriptions

Product Touch Screen 1200c single heating zone 3 gas channels CVD Furnace System 
Chamber Type Split Chamber
Display Touch Screen
Chamber Material Alumina Fiber
Heating Element  Aludirome
Max Temperature 1200°C
Usable Range ≤1150°C
Heating Rate ≤20°C(suggestion:10°C/min)
Heating Zone Single
Heated length 440mm
Length constant temperature 200mm
Tube Material High purity quartz
Tube Size Φ50mmx1000mm
  Φ60mmx1000mm
  Φ80mmx1000mm
  Φ100mmx1000mm
Vacuum Seal 4.03×10-3Pa
Temperature Control PID automatic control via SCR power control
Accuracy ±1°C
Preset curve 10
Thermocouple K Type
Working Voltage 220V 50Hz~60Hz
Max. Power 2.5KW
Gas Channels 3 (or as client’s requirement)
flowmeter float flowmeter
Channel A range 10~100ml/min
Channel B range 16~160ml/min
Channel C range 25~250ml/min
Vacuum degree 5~10Pa(If you need different vacuum,please choose other vacuum pump.)

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