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High vacuum automatic rotary and tilt PECVD

Model：KJ-PECVD

Description：

Model KJ-PECVD Part I: Standard Parts Tube Furnace Display LCD touch screen Chamber Split type and upper part can be opened Max. Temperature 1200℃for short time Continuous Woking Temp. 1100℃ Heating Rate Suggestion: 0~10℃/min (max. 20℃/min) T

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Detailed

Model		KJ-PECVD
Part I: Standard Parts
Tube Furnace	Display	LCD touch screen
	Chamber	Split type and upper part can be opened
	Max. Temperature	1200℃ for short time
	Continuous Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	400mm(Can be customized according to customer needs)
	Heating Element	Resistance wire with Mo
	Thermocouple	N type
	Temperature Control Accuracy	±1℃
	Tube Size	OD60mm x 100mm x 60mm Tube Length :1600 mm(Can be customized according to customer needs)
	Tube Size	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Customized Function	Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.

	RF frequency	13.56 MHz ±0.005% stability
	Matching	Automatic
RF Output Port	50 Ω, N-type, female
Noise	<50 dB.
Cooling	Air cooling.

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