Split Tube furnace
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1
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1200oC Max. working temperature for < 60 minutes
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2
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1100oC Max for continuous heating
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3
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30 segments programmable precision digital temperature controller
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4
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440 mm length single heating zone and 150 mm length constant temperate zone
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5
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High purity quartz tube optional from ( click optional bar to choose )
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6
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3.14"OD x 2.83"ID x 48'' Length
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7
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One pair of vacuum sealed flange with valves
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8
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Input power: 208 – 240V AC input, single phase at max. 4KW
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9
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Plasma RF Power supply
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1
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Output Power: 5 -500W adjustable with ± 1% stability
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2
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RF frequency: 13.56 MHz ±0.005% stability
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3
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Reflection Power: 200W max.
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4
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Matching: Automatic
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5
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RF Output Port: 50 Ω, N-type, female
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6
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Noise: <50 dB.
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7
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Cooling: Air cooling.
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8
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Power : 208-240VAC, 50/60Hz
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9
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Note: This RF power supply can accept 50 - 80 mm Max. quartz tube
by changing flange
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10
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Anti-corrosive
Pressure Gauge
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1
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3.8x10-5 to 1125 Torr measurement range
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2
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Anti-corrosive, gas-type independent
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3
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High accuracy and reproducibility at atmosphere for reliable atmospheric
pressure detection
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4
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Fast atmospheric detection eliminates waiting time and shortens process cycle
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5
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Easy to exchange plug & play sensor element
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6
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Vacuum Pump
and valve
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1
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Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust
System installed in bottom case with max. vacuum pressure 10-2 torr.
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2
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KFD25 adapter and stainless steel pipe are connected between pump and tube
flange with precision ball valve
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3
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Digital vacuum pressure gauge and display are installed with the furnace
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4
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4
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Mass Flow meters
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1
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Four precision mass flow meters (0.02% accuracy) with digital display are installed on
the bottom case to control
gas flow rate automatically.
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2
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MFC 1: Gas flow range from 0~100 sccm
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3
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MFC 2&3: Control range from 0~200 sccm
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4
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MFC 4: Control range from 0~500 sccm
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5
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One gas mixing tank is installed on bottom case with liquid release valve
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6
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4 stainless steel needle valves is installed on left side of bottom case to
control 4type gases mixing manually
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7
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Gas inlet fitting: four 1/4NPS
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8
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Gas outlet fitting: four 1/4NPS
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9
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