Customized corundum tube furnaces are widely used in multiple scientific research and industrial fields due to their high temperature resistance, corrosion resistance, precise temperature control, and flexible atmosphere control capabilities.
1. Semiconductor and Electronic Materials Field
Epitaxial growth and thin film deposition
Application: In the epitaxial growth of semiconductor materials such as silicon, silicon carbide (SiC), gallium nitride (GaN), etc., uniform deposition of single crystal thin films is achieved through multi temperature gradient temperature control.
Case: The three temperature zone tube furnace can control the heating, reaction, and cooling zones separately, used for the growth of silicon-based epitaxial layers, with a temperature accuracy of ± 1 ℃ and a film thickness uniformity of<5%. Doping and diffusion process
Application: In the manufacturing of transistors and solar cells, impurities such as boron and phosphorus are doped into silicon substrates through high-temperature diffusion to form PN junctions.
Advantages: Corundum tubes are resistant to high temperatures (≥ 1200 ℃) and chemically inert, avoiding impurity contamination and ensuring doping uniformity. Preparation of optoelectronic devices Application: In LED, laser diode and other devices, gallium nitride (GaN) or indium phosphide (InP) thin films are synthesized inside corundum tubes by chemical vapor deposition (CVD). Configuration: A high vacuum system (≤ 10 ⁻ ³ Pa) and hydrogen/ammonia atmosphere control are required to prevent material oxidation.
2. In the field of new energy materials
Synthesis of Positive and Negative Electrode Materials for Lithium ion Batteries Application: High temperature solid-phase synthesis of positive electrode materials such as lithium cobalt oxide (LiCoO ₂) and lithium iron phosphate (LiFePO ₄), or graphite, silicon carbon composite negative electrode materials.
Case: A horizontal tube furnace is used to calcine the precursor at 1000 ℃ under nitrogen protection. The material is uniformly mixed and the standard deviation of particle size distribution is less than 8% by rotating the furnace tube (0-10rpm). Preparation of Fuel Cell Catalysts Application: In proton exchange membrane fuel cells (PEMFC), platinum (Pt) or platinum alloy nanoparticles are reduced by a tube furnace and loaded onto a carbon carrier. Configuration: A hydrogen/argon mixed atmosphere is required, with a temperature control accuracy of ± 2 ℃ to avoid catalyst sintering. Solar cell material processing Application: In perovskite solar cells, the perovskite layer is annealed in a tube furnace to eliminate grain boundary defects and improve photoelectric conversion efficiency. Advantages: Corundum tubes are resistant to iodide corrosion and suitable for long-term stable operation.
3. Advanced ceramics and metal materials field
Ceramic material sintering Application: High temperature sintered structural ceramics such as alumina (Al ₂ O ∝) and silicon nitride (Si ∝ N ₄), or functional ceramics such as piezoelectric ceramics and magnetic ceramics. Case: A vertical tube furnace was used to sinter silicon nitride ceramics at 1600 ℃. By controlling grain growth through segmented heating (500 ℃/h → 1000 ℃/h), the bending strength was increased by 30%.
Metal Heat Treatment and Surface Modification Application: Annealing, quenching, and aging treatment of titanium alloys and nickel based high-temperature alloys, or improving wear resistance through surface hardening processes such as carburizing and nitriding.
Configuration: A rapid cooling system (such as compressed air injection) with a cooling rate of ≥ 50 ℃/min is required. Powder metallurgy and post-processing of 3D printing
Application: Stress relief annealing or hot isostatic pressing (HIP) treatment of metal 3D printed parts to eliminate pore defects.
Advantages: The tube furnace can achieve local heating and avoid deformation of complex structural components.
4. Nanomaterials and Catalysis
Synthesis of nanowires/nanotubes Application: Synthesize one-dimensional materials such as carbon nanotubes (CNT) and zinc oxide (ZnO) nanowires inside corundum tubes through chemical vapor deposition (CVD).
Configuration: Three temperature zones are required for independent temperature control (such as 600 ℃ -800 ℃ -1000 ℃), and a mass flow meter is used to accurately control the carbon source gas flow rate. Preparation of catalyst support
Application: Loading metal nanoparticles (such as Pt, Pd) on porous alumina and titanium dioxide (TiO ₂) carriers for catalytic conversion of automotive exhaust. Case: A tube furnace is used to reduce chloroplatinic acid (H ₂ PtCl ₆) at 500 ℃ to prepare a highly dispersed Pt/Al ₂ O3 catalyst with a CO conversion rate of>95%.
Research on Photocatalytic Materials
Application: In the preparation of photocatalysts such as TiO ₂ and g-C ∝ N ₄, the template agent is removed by calcination in a tube furnace to regulate the crystal phase structure.
Configuration: Air atmosphere is required, with a temperature control accuracy of ± 1 ℃, to avoid crystal phase transformation and reduce activity.
5. Chemical and Environmental Protection Fields
High temperature cracking and gasification
Application: In biomass gasification or plastic cracking, organic matter is converted into synthesis gas (CO+H ₂) through a tube furnace at 800-1200 ℃.
Configuration: High temperature resistant corundum tube (wall thickness ≥ 5mm) and anti carbon deposition design are required, with a continuous operation time of>1000 hours.
Regeneration of exhaust gas treatment catalyst
Application: High temperature sintering regeneration of deactivated automotive three-way catalytic converters to remove sulfur and phosphorus poisoning substances.
Case: When air is introduced into a tube furnace for oxidation regeneration at 600 ℃, the catalyst activity recovery rate is greater than 85%.
Crosslinking of polymer materials
Application: In the cross-linking modification of materials such as polyethylene (PE) and polytetrafluoroethylene (PTFE), the temperature resistance is improved by electron beam irradiation and tube furnace heat treatment.
Advantages: Corundum tubes are radiation resistant and suitable for long-term experiments.
6. Research and Education Fields
Basic Research in Materials Science
Application: University laboratories are used to explore new material synthesis pathways (such as two-dimensional materials, topological insulators), or to study high-temperature phase transition mechanisms.
Configuration: In situ XRD observation window or Raman spectroscopy interface is required to support real-time characterization.
Student Experimental Teaching
Application: Undergraduate laboratory courses are used to demonstrate classic material processes such as metal annealing and ceramic sintering.
Advantages: Safe operation of tube furnace (such as power outage and over temperature alarm when opening the door), suitable for teaching scenarios.
7. Customization advantages and typical cases
Multi temperature zone design: A research institute customized a five temperature zone tube furnace for the preparation of gradient functional materials (FGM), achieving continuous transition of components through independent temperature control.
Rotating furnace tube: A certain enterprise customizes a rotating tube furnace for the spheroidization treatment of nanoparticles, and controls the particle size distribution (D50=500nm ± 50nm) through centrifugal action.
High pressure atmosphere: A laboratory customized a high-pressure tube furnace (pressure ≤ 10MPa) for supercritical hydrothermal synthesis of nanomaterials, breaking through the limitations of conventional atmospheres.
Summary: Customized corundum tube furnace can meet diverse needs from basic research to industrial production by flexibly configuring parameters such as temperature zone, atmosphere, and furnace tube size. It is particularly irreplaceable in the treatment of high-temperature, corrosive, or atmosphere sensitive materials.