Daily maintenance of plasma enhanced PECVD coating electric furnace

The daily maintenance of plasma enhanced PECVD coating electric furnace can start from equipment cleaning, component inspection, parameter calibration, environmental maintenance, etc., as follows:

1. Equipment cleaning
Furnace cavity cleaning: Regularly remove residual substances, impurities, and deposits from the furnace cavity to avoid interference with the film growth process. After every 10 coating cycles, wipe the chamber with a dust-free cloth and a special solvent (such as anhydrous ethanol), taking care to avoid scratching the inner wall with hard objects.
Cleaning of reaction chamber window: Ensure clear visibility of the reaction chamber and use appropriate solvents or cleaning agents to wipe it.
Air system cleaning: Regularly inspect and clean gas delivery pipelines, valves, filters, etc. to ensure smooth gas flow.
Equipment surface cleaning: Use a clean soft cloth to gently wipe the surface of the equipment to remove dust and dirt. Avoid using highly corrosive cleaning agents to prevent damage to the surface of the equipment.

2. Component inspection
Check gas supply system: Regularly inspect gas pipelines, valves, and pressure gauges to ensure normal gas supply and no leaks. If necessary, replace damaged components. At the same time, it is necessary to ensure that the gas purity meets the standards specified by the equipment, as impure gases may affect the performance and quality of the membrane layer.
Check the vacuum system: For vacuum PECVD coating electric furnaces, it is necessary to ensure that the vacuum system is operating normally, and check whether the vacuum pump and valves are working properly to maintain a stable vacuum degree. Before starting up, check the oil level and quality of the vacuum pump. If the oil level is too low, it will affect the pumping performance of the vacuum pump. If the oil quality deteriorates, it may lead to vacuum pump failure. At the same time, it is necessary to check whether vacuum detection equipment such as vacuum gauges are working properly.
Check the sealing ring: Check whether the sealing ring of the vacuum system is intact, repair or replace damaged components. Rubber components such as O-rings and door seals are prone to aging and require monthly inspection for cracking and deformation. Vacuum silicone grease should be applied to maintain lubrication and ensure that the vacuum level meets the standard.
Check electrodes and nozzles: Regularly inspect the wear of electrodes and nozzles, and replace worn electrodes and nozzles if necessary. This helps to maintain the stability and efficiency of the plasma.
Check heating elements: Regularly inspect and clean heating elements to ensure uniform and stable heating, and avoid affecting temperature control and film quality due to component damage.
Check the cooling system: For plasma equipment that requires a cooling system, regularly check the circulation of the coolant and the working status of the cooling system. If necessary, replace the coolant or repair the cooling system. At the same time, check the liquid level, flow rate, and temperature of the coolant to ensure that the cooling system can work properly, as many components (such as power supplies, target materials, etc.) generate heat during the coating process and require the cooling system to maintain normal operating temperature.
Check the power cord and plug: Ensure that the power cord is not worn, broken, or aged. Check if the plug is loose or damaged, and replace it promptly if necessary.
Check the safety valve: Ensure that the safety valve is set correctly, able to release pressure in a timely manner, and ensure the safety of equipment and operators.
Check the alarm system: Regularly check the functionality of the alarm system to ensure that it can issue alarms in a timely manner and take necessary measures in emergency situations.

3. Parameter calibration
Calibrate equipment parameters: Regularly calibrate equipment parameters according to the manufacturer’s recommendations to ensure accuracy and stability of the equipment. For example, regularly calibrating a vacuum gauge to ensure accurate vacuum readings can help control reaction pressure; Calibrate temperature controllers or thermocouples to ensure accurate temperature measurement and ensure the stability of thin film growth; Check the accuracy of the gas flow meter and adjust the flow control to ensure the stability of the reaction atmosphere.

4. Environmental maintenance
Maintain good ventilation: Ensure sufficient space around the equipment for heat dissipation. Avoid placing the equipment in high temperature, humid or enclosed environments to avoid affecting its performance. The relative humidity of the environment should generally be controlled between 40% and 60%. Excessive humidity may cause rusting of equipment components, electrical failures, and condensation of metal vapor generated during the coating process. At the same time, it is necessary to avoid exposing the equipment to corrosive gases or liquids.
Equipment installation location: It should be installed on a stable and sturdy ground to avoid vibration caused by unstable placement, which may affect the quality of coating. At the same time, sufficient space should be reserved around the equipment for easy operation, maintenance, ventilation, and heat dissipation.

5. Operating standards
Follow the operating procedures: When using, be sure to follow the operating procedures and safety precautions. Avoid improper operation to prevent damage to the equipment. For example, after coating is completed, the machine should be shut down in the order specified in the operation manual. Generally, the coating power is turned off first, then the gas supply is stopped, and the vacuum system is turned off. After the vacuum chamber pressure returns to normal, the cooling system and main power are turned off. This can prevent the device from suddenly shutting down in an abnormal state and prevent equipment damage.
Personal protection: It is necessary to wear dust masks (to avoid inhaling nanoparticles) and acid and alkali resistant gloves (in contact with cleaning solvents) during maintenance.
Discharge protection: After turning off the power, wait for at least 30 minutes to ensure that the high-voltage capacitor is completely discharged.
Waste disposal: Waste target materials and cleaning agents containing metal residues should be recycled according to hazardous waste standards to avoid environmental pollution.

6. Record and maintain archives
Establish equipment operation logs: record key parameters such as vacuum degree, sputtering current, substrate temperature, etc. for each coating. Abnormal fluctuations in data are often a precursor to faults, such as slow vacuum pumping speed, which may indicate mechanical pump oil contamination.
Establish equipment maintenance records: record the operation status, maintenance time, and content of the equipment, in order to promptly identify potential issues with the equipment. The maintenance cycle depends on the frequency of use and working environment of the equipment. It is generally recommended to conduct an overall maintenance every certain period of time (such as 1-3 months) or after completing a certain coating task.