Experimental tubular CVD electric furnace

The experimental tubular CVD electric furnace is a widely used heat treatment equipment in the fields of materials science and engineering. It has core advantages such as high temperature performance, precise temperature control, gas management, efficient deposition, wide applicability, and stability and reliability. It is an ideal choice for material preparation and thin film deposition experiments.

1. Core advantages
High temperature performance: The heating temperature of some CVD electric furnaces can reach up to 1700 ℃ or even higher, which can meet the strict experimental requirements for high temperature such as silicon carbide coating and crystalline silicon substrate coating.
Precise temperature control: Equipped with a precise temperature controller, it can achieve precise temperature control. Some models of electric furnaces can achieve an accuracy of ± 1 ℃, ensuring the accuracy and stability of the experiment.
Gas management: Through a precise gas delivery system, the reaction gas is transported to the reaction chamber and activated under high temperature and possible plasma excitation to enhance its chemical activity. At the same time, both ends of the equipment are sealed with stainless steel high vacuum flanges to ensure airtightness and high temperature resistance.
Efficient deposition: capable of preparing high-quality, large-area thin films, such as graphene and other carbon materials, with sizes up to several centimeters. The composition of the film is accurate and controllable, with a wide range of ratios and thicknesses ranging from a few hundred angstroms to several millimeters. It can achieve thick film deposition and can be produced in large quantities.
Wide applicability: Suitable for various CVD processes and high-temperature experimental research in semiconductor manufacturing, MEMS manufacturing, optics and optoelectronics fields. In addition to being used in CVD experiments, it can also be used in research fields such as vacuum sintering, preparation of nanomaterials sintered in vacuum protective atmosphere, and preparation of battery materials.
Stable and reliable: It can maintain stable operation at high temperatures, reduce errors, and improve the accuracy and reliability of experiments. The furnace material adopts high-efficiency and energy-saving materials such as ceramic fibers or polycrystalline alumina fibers to improve energy utilization efficiency, while reducing the temperature of the furnace shell and ensuring operational safety.

2. Application Fields
Thin film deposition: capable of preparing metal thin films, semiconductor thin films, optical thin films, etc., such as the deposition of carbon materials such as graphene.
Nanomaterial preparation: Nanomaterials such as nanoparticles and nanowires can be prepared. By adjusting reaction conditions and substrate materials, nanomaterials with different morphologies and sizes can be synthesized.
Ceramics and Metallurgy: Used for powder roasting and sintering of ceramic materials, as well as forming metal or ceramic materials through gas-phase reactions.
High temperature experiment: As an experimental equipment, it can be used for various research experiments such as high-temperature atmosphere sintering, atmosphere reduction, vacuum annealing, etc.

3. Selection suggestions
Temperature requirement: Select the appropriate heating temperature range according to the experimental requirements to ensure that the equipment can meet the highest temperature requirements of the experiment.
Temperature control accuracy: For experiments that require precise temperature control, equipment with high temperature control accuracy should be selected to ensure the accuracy and stability of the experiment.
Gas management: Select appropriate gas delivery systems and sealing methods according to experimental requirements to ensure accurate delivery and airtightness of reaction gases.
Furnace size: Select the appropriate furnace size based on the size of the experimental sample to ensure that the sample can be uniformly heated.
Brand and after-sales service: Choose well-known brands and manufacturers that provide comprehensive after-sales service to ensure the quality and long-term stability of the equipment.