Application of experimental tubular CVD electric furnace in the new materials industry

The application of experimental tubular CVD electric furnaces in the new materials industry is extensive and in-depth, mainly reflected in the following aspects:

1. Preparation of Thin Film Materials
Metal thin film: By precisely controlling the reaction gas and temperature, uniform and dense metal thin films such as copper, aluminum, titanium, etc. can be deposited on the substrate. These thin films have wide applications in electronic devices, sensors, and other fields.
Semiconductor thin film: The deposition of thin films of semiconductor materials such as silicon and germanium is a key step in the manufacturing of integrated circuits, solar cells, and so on. The tubular CVD electric furnace can provide a stable and controllable heating environment, ensuring the quality and performance of the thin film.
Optical thin films: Deposition of optical thin films such as silicon nitride and silicon oxide, which can be used to prepare anti reflective coatings, anti reflective coatings, etc., to improve the performance and service life of optical products.

2. Nanomaterial synthesis
Nanoparticles: By adjusting reaction conditions and substrate materials, nanoparticles with different morphologies and sizes can be synthesized, such as gold, silver, iron oxide, etc. These materials have important applications in catalysis, biomedical and other fields.
Nanowires: The synthesis of nanowires such as carbon nanotubes and silicon nanowires has broad application prospects in fields such as nanoelectronics and nanosensors. The linear heating program of the tubular CVD electric furnace can accurately control the growth rate and diameter of nanowires.

3. Preparation of Ceramic Materials
High performance ceramics: Through powder baking and sintering processes, high-performance ceramic products can be prepared, such as alumina, silicon nitride and other ceramic materials, which have wide applications in mechanical, electronic, chemical and other fields. The high temperature resistance and precise temperature control ability of the tubular CVD electric furnace ensure the preparation quality of ceramic materials.
Ceramic coatings: Deposition of ceramic coatings such as silicon carbide, zirconia, etc. These coatings can improve the wear resistance, corrosion resistance, and high temperature stability of materials, and are widely used in aerospace, automotive manufacturing, and other fields.

4. Preparation of composite materials
Metal based composite materials: Metal based composite materials are formed by depositing ceramic or metal thin films on a metal substrate through gas-phase reactions. These materials combine the advantages of metal and ceramic, and have characteristics such as high strength, high hardness, and high wear resistance.
Ceramic based composite materials, such as carbon fiber reinforced ceramic based composite materials, have important applications in aerospace, energy and other fields. The tubular CVD electric furnace can provide a stable and controllable heating environment for the preparation of composite materials.

5. Research and development of new energy materials
Lithium ion battery materials: such as the preparation and modification research of positive and negative electrode materials, tubular CVD electric furnace can be used to optimize the performance of electrode materials, improve the cycle life and energy density of lithium-ion batteries.
Fuel cell catalysts: Preparation and performance research of platinum based catalysts, tubular CVD electric furnaces can provide high temperature and controllable atmosphere environment, promoting catalyst activation and performance improvement.

6. Research and development of other new materials
High temperature superconducting materials: The tubular CVD electric furnace can be used to prepare high-temperature superconducting thin film materials, providing support for the research and application of superconducting technology.
Biomedical materials: such as the preparation of biocompatible thin film materials, which can be used in medical fields such as the treatment of cardiovascular diseases.