Common faults and solutions of experimental tubular CVD electric furnace

The common faults and solutions of experimental tube CVD electric furnace are as follows:

1. Temperature control malfunction
The temperature cannot reach the set value
Possible causes: heating element failure (such as broken or aged resistance wires), control system issues (such as improper PID parameter settings, controller failure), temperature sensor failure (such as damaged thermocouples, position deviation).
resolvent:
Check if the heating element is damaged and replace it if necessary.
Adjust PID parameters to optimize the stability of the control system.
Calibrate or replace the temperature sensor to ensure its accuracy and correct position.
Excessive temperature fluctuations
Possible reasons: malfunction of the air circulation system (such as improper adjustment of the baffle, motor failure), poor contact of the thermocouple, and unstable control system.
resolvent:
Check the wind circulation system to ensure normal wind circulation, and adjust the baffle opening appropriately.
Check the connection of the thermocouple to ensure good contact.
Adjust PID parameters to optimize the stability of the control system.
High temperature or over temperature alarm
Possible reasons: excessively high temperature setting, control system malfunction, safety device triggering (such as over temperature protection device activation).
resolvent:
Reduce the temperature setting value to ensure it is within a safe range.
Check the control system and troubleshoot (such as controller malfunction, short circuit in the circuit).
Check the safety device, confirm its normal operation, and reset or replace it if necessary.
Slow heating in the low-temperature range
Possible reasons: The furnace is not dry, too many samples are placed, causing air circulation to be blocked, and the refrigeration system is malfunctioning (such as during low-temperature testing).
resolvent:
Ensure that the furnace is dry and avoid water evaporation and heat absorption.
Reduce the number of samples to ensure normal air circulation.
Check the refrigeration system and contact the manufacturer for repairs if necessary.

2. Equipment startup and operation failures
Device without power display
Possible reasons: improper plug insertion, blown fuse, blown control circuit fuse.
resolvent:
Check if the plug is properly plugged in and if the power supply is functioning properly.
Replace the fuse or fuse.
Check the control circuit and eliminate short circuits or open circuits.
No response after device startup
Possible reasons: The safety lock has not been released, the main switch has not been closed properly, and the control power adjustment potentiometer is damaged.
resolvent:
Confirm that the security lock has been released and the device is in a bootable state.
Check if the main switch is closed properly.
Replace the control potentiometer or check the relevant circuit.
Sudden failure during equipment operation
Possible reasons: Control system malfunction, overcurrent/overvoltage protection action, inverter board or inverter circuit malfunction.
resolvent:
According to the fault display prompt on the control instrument, refer to the equipment operation manual for troubleshooting.
Check the overcurrent/overvoltage protection device and confirm its normal operation.
Check the inverter board and circuit, and replace faulty components if necessary.

3. Gas flow and mixing faults
Inaccurate gas flow control
Possible reasons: unstable gas supply system, insufficient flow control accuracy, and unreasonable design of gas distribution system.
resolvent:
Check the gas supply system to ensure stable gas supply.
Use high-precision flow meters and controllers to improve flow control accuracy.
Optimize the design of gas distribution system to ensure uniform gas flow.
Uneven gas mixing
Possible reasons: design defects in the reaction chamber and poor performance of the mixing device.
resolvent:
Optimize the design of the reaction chamber, such as adding a mixer or adjusting the position of the air inlet.
Strengthen the monitoring of the reaction process to ensure even gas mixing.

4. Equipment maintenance and upkeep malfunctions
Heating element aging or damage
Possible reasons: Long term high-temperature operation and unstable voltage.
resolvent:
Regularly check the working status of the heating element and replace it if necessary.
Ensure stable power supply voltage of the equipment and avoid damage to heating elements caused by voltage fluctuations.
Furnace cracking or damage
Possible reasons: Failure to bake after first use or prolonged disuse, furnace temperature exceeding rated value, improper use (such as sudden cooling and heating).
resolvent:
After the first use or long-term disuse, bake according to the instructions.
Ensure that the furnace temperature does not exceed the rated value to avoid overheating.
Avoid sudden cooling and heating during use, and follow the equipment operating procedures.
Reduced vacuum
Possible reasons: Aging of temperature resistant silicone rings between stainless steel flanges and vacuum system failure.
resolvent:
Replace the heat-resistant silicone ring or reinstall the stainless steel flange.
Check the vacuum system, repair any leaks or replace faulty components.