Application of Vertical Vacuum Furnace in the New Materials Industry

Vertical vacuum furnaces are widely and crucially used in the new materials industry. By providing a non oxidizing, high vacuum environment and precise temperature control capabilities, they have become an important tool for promoting the development of cutting-edge fields such as nanomaterials, superconducting materials, third-generation semiconductors, graphene, etc. Analyze from multiple dimensions as follows:

1. Preparation of Nanomaterials and Superconducting Materials: Ensuring Performance in a Pure Environment
Nanomaterial synthesis
In a vacuum environment, a vertical vacuum furnace can effectively remove impurities (such as oxygen, carbon, etc.) from materials and avoid nanoparticle aggregation. For example, by controlling the ratio of H ₂/N ₂ mixed atmosphere (volume ratio 1:9) and synergistically working at a high temperature of 1000 ℃, single-layer graphene with a purity of>99.5% can be prepared, and the controllability of the number of layers can reach ± 1 layer, meeting the strict requirements of electronic devices for material uniformity.
Preparation of Superconducting Materials
The synthesis of high-temperature superconducting materials (such as YBCO) needs to be carried out under vacuum or inert gas protection to prevent oxidation from causing a decrease in superconducting performance. The vertical vacuum furnace can achieve uniform phase formation of superconducting materials and increase the critical current density by more than 20% through precise temperature control (± 1 ℃) and atmosphere control (such as high-purity argon gas).

2. Third generation semiconductor material processing: inhibiting oxidation and improving crystal quality
Growth of Silicon Carbide (SiC) Crystals
At temperatures above 1600 ℃, a vacuum environment can inhibit the oxidation of carbon elements and promote the full reaction of silicon carbon atoms to form a single crystal structure. Experimental data shows that the defect rate of SiC single crystals sintered in vacuum is reduced by 42% compared to traditional processes, and the crystal growth rate is increased by 25%, meeting the demand for high-frequency and high-voltage devices in 5G communication and new energy vehicles.
Gallium Nitride (GaN) Epitaxial Growth
By using the metal organic chemical vapor deposition (MOCVD) process in a vertical vacuum furnace, the flow ratio of NH3 to TMGa (1:1-1:5) can be precisely controlled in a vacuum environment to prepare high-quality GaN epitaxial layers with a dislocation density<10 ⁶ cm ⁻ ², which can be applied to high brightness LEDs and RF power devices.

3. High temperature reactions and catalyst preparation: precise control of reaction pathways

Synthesis of Metal Organic Framework Compounds (MOFs) In a vertical vacuum furnace, by precisely controlling the N ₂ flow rate (50mL/min) and residence time, ultra microporous MOFs with a specific surface area>3000m ²/g can be prepared, which is 40% higher than traditional processes and widely used in gas storage and catalysis fields.
Catalyst sintering and activation
A vacuum environment can prevent catalyst sintering and agglomeration at high temperatures, while maintaining a high specific surface area. For example, after heat treatment at 800 ℃ in a vacuum furnace, the standard deviation of particle size distribution of Pt/C catalyst is less than 0.5nm, the catalytic activity is increased by 18% compared to traditional processes, and the amount of precious metals used is reduced by 30%.

4. Development of new energy materials: improving battery performance and recycling efficiency
Preparation of positive and negative electrode materials for lithium batteries
By controlling the oxygen partial pressure (10-100Pa) and temperature gradient (preheating section 500 ℃ → reaction section 900 ℃ → cooling section 200 ℃) inside the furnace, the vertical vacuum furnace can achieve uniform doping of LiNi ₀. 8Co ₀. 1Mn ₀. 1O ₂ (NCM811) material, with a battery cycle life exceeding 2000 times and a capacity retention rate increased to 98%.
Retired battery recycling
Using vacuum pyrolysis process (500-800 ℃), electrode materials and separators can be separated, with cobalt, nickel, and lithium recovery rates>95%, reducing wastewater discharge by 90% compared to wet metallurgy process, and achieving resource utilization.

5. Technological advantages support application expansion
Ultra high vacuum degree (≤ 10 ⁻⁴ Pa)
Effectively eliminate interference factors such as oxygen and water vapor, avoid material oxidation or introduction of impurities, and ensure the performance stability of high-purity ceramics, semiconductors, and other materials.
Accurate temperature control (± 1 ℃) and multi-stage programmed heating
Support 30 stage heating curve settings, accurately simulate the material sintering kinetics process, and avoid cracking or uneven performance caused by temperature gradients.
Vertical structure optimization production efficiency
Some models are equipped with underground quenching oil buffer tanks and scissor lifts, reducing the workpiece loading cycle time to 25 seconds and increasing efficiency by 40% compared to horizontal furnaces, meeting the needs of large-scale production.