Application of Vacuum Tube CVD Electric Furnace in Nanomaterials Industry

The application of vacuum tube CVD electric furnace in the nanomaterials industry is extensive and in-depth, mainly reflected in the following aspects:

1. Preparation of carbon based nanomaterials
Carbon nanotubes (CNTs):
Preparation principle: Carbon nanotubes are grown on a substrate by catalyzing the decomposition of carbon containing gases such as methane and ethylene.
Application advantages: CVD furnace can precisely control temperature, atmosphere and other conditions, allowing gas reactants to undergo chemical reactions at high temperatures and deposit on the substrate surface to form the required nanostructures. By adjusting the reaction conditions, carbon nanotubes with different diameters, wall thicknesses, and lengths can be prepared.
Specific case: By introducing an argon/hydrogen mixture into a quartz tube and using ferrocene as the catalyst precursor, high-quality carbon nanotubes can be prepared by cracking acetylene/methane at 800-1000 ℃.
Graphene:
Preparation principle: Under high temperature and high vacuum environment, carbon containing gaseous substances (such as methane) are introduced into the furnace with hydrogen gas as the reducing gas, allowing carbon atoms to deposit and grow into graphene films on the surface of metal substrates (such as copper and nickel).
Application advantages: CVD furnace can precisely control reaction conditions, prepare large-area, continuous graphene films, and the film quality is high with few defects.
Specific case: Single layer graphene can be prepared on a copper foil substrate by using methane as the carbon source, hydrogen argon mixture as the carrier gas, and reacting at 1050 ℃ for 30 minutes.

2. Preparation of metal oxide nanomaterials
Preparation principle: By using CVD technology, precise control of the morphology, size, and properties of metal oxide nanomaterials can be achieved by adjusting parameters such as the type, concentration, and temperature of the reaction gas.
Application advantages: CVD furnace can prepare metal oxide nanomaterials with unique physical and chemical properties, such as titanium dioxide, zinc oxide, copper oxide, etc. These materials show great potential for applications in solar cells, catalysts, optoelectronic devices, and other fields.
Specific case: By calcining the precursor at 700 ℃ in an oxygen atmosphere, high-purity zinc oxide nanomaterials can be prepared for use in the fields of optoelectronic devices and sensors.

3. Preparation of Nano 2D Materials
Preparation principle: Two dimensional materials refer to materials with a thickness of only one to a few atoms, which have a high specific surface area and unique physical and chemical properties. CVD furnace can produce high-quality two-dimensional materials by precisely controlling the reaction conditions.
Application advantages: CVD furnace can prepare two-dimensional materials such as graphene, TMDs (such as MoS ₂, WS ₂, MoTe ₂, WSe ₂, etc.), black phosphorus, Mxene and other topological insulators. These materials have broad application prospects in biomedical, energy storage, sensing applications and other fields.
Specific case: Using a CVD furnace and ammonia borane as a precursor, high-quality two-dimensional boron nitride materials can be prepared by depositing in an ammonia atmosphere at 1100 ℃.

4. Preparation of other nanomaterials
Nano silicon coated carbon materials: CVD furnaces also play an important role in the preparation of silicon carbon negative electrode materials. By vapor deposition, a layer of nano silicon can be coated on the surface of carbon materials to improve their lithium storage performance and cycling stability.
MXene/carbon nanotube composite material: By using CVD furnace, carbon nanotubes can be grown on the surface of MXene to prepare MXene/carbon nanotube composite material. This composite material has excellent absorption properties and can be used in the field of electromagnetic wave absorption.