The precautions for using a rapid annealing RTP tube furnace are as follows:
1. Preparation before the experiment:
Turn on the gas circuit switches for compressed air and process gas to ensure stable gas supply.
Check whether the power supply circuit of the equipment is intact, without any exposure or aging, to avoid safety hazards.
Confirm that there are no remaining objects in the furnace to prevent fires or explosions caused by high temperatures.
Check the sealing of the furnace door to ensure that heat does not leak, which is both energy-saving and safe.
2. Layout operation:
After the instrument self-test is completed, the screen displays the main interface. At this time, gently open the door latch handle and pull out the tray rack.
When placing the sample, special tools should be used to keep hands dry and away from high temperature areas to prevent burns.
Confirm that the thermocouple wire under the tray is correctly placed in the hole, slowly push back the tray frame, and close the door latch handle. If the thermocouple wire is misaligned, it will result in inaccurate real-time temperature sensing.
3. Program editing and running:
Click on the program number bar to open the program drop-down selection list. Find the program you have edited or an empty program from the drop-down list, and click the “edit” icon to edit the interface.
When editing the program, it is necessary to carefully check the temperature rise and fall rate, target temperature, and other parameters to ensure compliance with the process requirements.
After the program editing is completed and confirmed to be correct, click to save the program, then click to return to the main interface, and click to start running the process.
4. Monitoring during the manufacturing process:
During the manufacturing process, the real-time operation status, temperature, pressure, process time, and other information of each functional module can be observed on the screen.
If any abnormalities are found, emergency measures should be taken immediately, such as stopping heating, closing the gas circuit, etc., to prevent the accident from escalating.
5. Sampling and shutdown:
After the program runs, it is necessary to wait for the furnace temperature to cool down to a safe temperature (such as below 100 ℃) before stopping ventilation and opening the furnace to remove materials.
After the sampling is completed, push it back to the tray rack and wait for the instrument to self check again. After the self check is completed, press the red button to shut down, swipe the card to get off the machine, and close the air circuit valve.
6. Equipment maintenance and upkeep:
Regularly check whether the thermocouples, heating elements, and other components in the rapid annealing furnace are working properly. If there are any abnormalities, they should be repaired or replaced in a timely manner.
Keep the equipment clean and prevent dust, dirt, and other debris from entering the furnace to avoid affecting the annealing effect and equipment performance.
Regularly check whether the electrical connections of the temperature control system are in good contact, and pay special attention to whether the connections of each connection point of the heating element are tight.
7. Safety precautions:
Operators must undergo professional training, be familiar with the operating procedures of the equipment, and strictly follow the procedures for operation.
It is forbidden to pull out the tray rack at high temperatures. If the program is interrupted for some reason and the chamber is still in a high temperature state, the temperature should be lowered first before pulling out the tray rack.
If there is a gas or cooling water alarm, check if the gas and cooling water are turned on. If there is an unexplained alarm, please contact the instrument administrator.
Ensure good ventilation in the laboratory or production workshop to avoid the accumulation of harmful gases.