Application of Vacuum Coating CVD Electric Furnace in Aerospace Industry

The application of vacuum coating CVD electric furnace in the aerospace industry is extensive and critical, mainly reflected in the following aspects:

1. Engine and high-temperature component protection
Thermal barrier coating (TBC): Aircraft engines (such as turbine blades, combustion chambers) and spacecraft re-entry modules (such as return cabin outer walls) must withstand high temperatures of over 1000 ℃ and airflow erosion. The CVD electric furnace uses electron beam physical vapor deposition (EB-PVD) technology to prepare yttria stabilized zirconia (YSZ) thin films on the surface of turbine blades, reducing the blade substrate temperature by 150-300 ℃ and significantly improving the engine thrust to weight ratio and lifespan.
Anti oxidation/anti-corrosion film: Metal intermetallic compound films such as CrAlY and TiAlN are evaporated on the surfaces of engine combustion chambers and fuel nozzles to resist oxidation and corrosion of high-temperature gases (including O ₂, CO ₂, H ₂ O) and extend the service life of components.

2. Optical system and window coating
Anti reflective film: By evaporating MgF ₂, SiO ₂ and other materials, the surface reflectivity of optical components is reduced (from 5% to below 1%), the lens transmittance is improved, and the clarity of remote sensing imaging and navigation positioning is ensured. For example, it is widely used in key equipment such as satellite remote sensing cameras, spacecraft portholes, and optical lenses for missile guidance heads.
Reflective film/filter film: Metal or multi-layer dielectric films such as Al, Ag, Au are deposited on the mirrors of satellite solar wings and space telescopes to achieve high reflectivity (for concentrating energy); Or prepare narrowband filter films to screen specific wavelengths of light (such as infrared and ultraviolet) to meet the needs of remote sensing detection and target recognition.
Anti radiation film: Coating the surface of spacecraft portholes and optical lenses with anti ultraviolet (UV) and anti solar radiation films to avoid aging and damage to optical components caused by extreme light exposure.

3. Electronic and Circuit System Protection
Electromagnetic shielding film: Metal thin films such as Cu, Ni, Ag are plated on the surface of electronic device casings or circuit boards to form a conductive layer, shielding the interference of space electromagnetic radiation (such as solar wind, cosmic rays) on circuits, avoiding signal distortion or component damage.
Insulation/moisture-proof film: By vacuum evaporating inorganic dielectric films such as SiO ₂ and Al ₂ O ∝, a dense insulation layer is formed on the surface of circuit solder joints and chips to prevent the phenomenon of “cold welding” (direct adhesion of metal surfaces) in vacuum environment, while isolating trace amounts of water vapor from corroding components.

4. Surface functional coating for spacecraft
Solar panel coating: Coating anti reflective film (such as SiNx) on the surface of photovoltaic cells to improve the efficiency of solar light absorption; At the same time, Al and Ag reflective films are plated on the back panel of the battery to enhance the secondary utilization of light and improve the power generation efficiency of the battery.
Wear resistant/impact resistant film: DLC (diamond-like carbon) film is coated on the surface of spacecraft portholes and solar panels to increase surface hardness (Mohs hardness 8-9) and resist impact wear from micrometeorites and space dust.

5. Coating for precision instruments and sensors
Conductive/electrode film: Plating precious metal thin films such as Pt and Au on the surface of sensor probes as electrodes or conductive layers to ensure the stability of signal transmission (such as spacecraft attitude sensors).
Functional sensitive film: Semiconductor thin films such as ZnO and TiO ₂ are prepared by vacuum sputtering for gas sensors (detecting harmful gases in spacecraft cabins) or humidity sensors, improving detection accuracy and response speed.