Precautions for using vacuum coating CVD electric furnace

The precautions for using a vacuum coated CVD electric furnace are as follows:

1. Equipment installation and preparation:
Follow the equipment operation manual and install the equipment in the correct order to ensure that all components are tightly connected, such as electrode connections, quartz tube joint assembly, vacuum pump connections, etc. Pay special attention to the position of sealing components such as rubber rings to avoid damage during the tightening process.
Clean the reaction chamber thoroughly before use, ensuring that there are no impurities in the reaction chamber, pipelines, valves, and other components. Use disposable latex finger cots and other tools to avoid direct contact with seals or other sensitive parts with bare hands.
Check the gas supply to ensure the supply of gases required for coating, such as SiH ₄, NH ∝, etc. Check if the gas pipeline connections are correct and secure, if the gas pressure meets the requirements, and if the gas purity meets the equipment’s specified standards.

2. Startup and parameter settings:
Follow the equipment operation manual and start the equipment in the correct order. After startup, check and set various parameters through the touch panel, such as gas flow rate, tube furnace temperature curve, vacuum pump, etc.
According to the coating process requirements, accurately set the gas flow rate. Set the heating program for the tube furnace to ensure that the temperature curve meets the requirements. Before heat treatment, adjust the vacuum degree in the pipe to meet the operating requirements and avoid too high or too low vacuum degree.

3. Operation monitoring and adjustment:
During the coating process, pay close attention to changes in parameters such as vacuum degree, gas flow rate, and temperature. If there is any abnormality, the coating operation should be stopped immediately, the cause should be identified and dealt with.
Regularly check the coating effect, such as film thickness, uniformity, adhesion, etc. If abnormal coating is found, adjust the process parameters or stop coating in a timely manner.

4. Device shutdown and cleaning:
After the coating is completed, turn off the equipment in the order specified in the equipment operation manual. Tube furnace heat treatment, vacuum pump, and finally turn off irrelevant gases.
After turning off the device, wait for it to cool down to a safe temperature and clean the remaining coating materials, dust, and other impurities inside the device. Use specialized cleaning tools and cleaning agents for cleaning, but be careful to avoid corrosion of equipment components caused by cleaning agents.

5. Safe operation and protection:
Strictly follow the operating procedures and safety rules, equip with a separate regulated power supply and grounding system to ensure stable power supply.
Operators must wear necessary labor protection equipment, such as protective goggles and gloves.
For operations involving toxic or flammable gases, additional safety measures must be taken, such as ventilation equipment, explosion-proof devices, etc.

6. Equipment maintenance and upkeep:
Regularly check the safety performance of the equipment, such as whether the cable contact is good, whether the vacuum pump is normal, etc.
Regularly maintain and upkeep the equipment, including replacing vacuum pump oil, checking seals, cleaning target materials, calibrating instruments, etc. The maintenance cycle depends on the frequency of use and working environment of the equipment. It is generally recommended to conduct an overall maintenance every certain period of time (such as 1-3 months) or after completing a certain coating task.
Establish equipment maintenance files to record information such as equipment operation, maintenance time, and content, in order to promptly identify potential issues with the equipment.