Daily maintenance of vacuum coating CVD electric furnace

As a precision equipment, the daily maintenance of vacuum coating CVD electric furnace is crucial to ensure stable equipment performance, extend service life, and ensure coating quality. The following is a detailed guide for daily maintenance of vacuum coated CVD electric furnaces:

1. Daily cleaning and dust removal
External cleaning:
Wipe the device casing with a soft dry or slightly damp cloth (avoid using cleaning agents containing chemical solvents) to remove dust and stains.
Pay special attention to cleaning the equipment operation panel, buttons, and indicator lights to ensure they are clearly visible and functioning properly.
Internal cleaning:
After the equipment has cooled to a safe temperature, open the reaction chamber door and use specialized cleaning tools (such as vacuum cleaners, soft bristled brushes) to remove dust and residue from the reaction chamber.
Clean key components such as quartz tubes, electrodes, and heating elements, avoiding scratching with hard objects or sharp tools to prevent surface damage.
For difficult to remove stains, a specialized cleaning agent (confirmed to be compatible with the equipment material) can be used for wiping, then rinsed with clean water and dried.
Vacuum system cleaning:
Regularly check the oil level of the vacuum pump to ensure that it is within the normal range. If the oil level is too low, it is necessary to add or replace the vacuum pump oil in a timely manner.
Clean the intake and exhaust ports of the vacuum pump to prevent dust and impurities from entering the pump and affecting its performance.
Regularly check whether the vacuum pipeline connection is tight and whether there is any air leakage. If there is any air leakage, it is necessary to tighten or replace the sealing components in a timely manner.

2. Key component inspection and maintenance
Electrode inspection:
Regularly check the connection of the electrodes to ensure a secure and reliable connection between the electrodes and the power supply.
Observe whether there is erosion, oxidation, or corrosion on the surface of the electrode. If there is any abnormality, the electrode should be cleaned or replaced in a timely manner.
Heating element inspection:
Check whether the connection of heating elements (such as resistance wires and heating rods) is firm, and whether there is any breakage or short circuit phenomenon.
Observe whether there is oxidation or corrosion on the surface of the heating element. If there is any abnormality, the heating element should be cleaned or replaced in a timely manner.
Quartz tube inspection:
Regularly check the integrity of the quartz tube and observe for cracks, damage, or deformation. If there is any abnormality, the quartz tube should be replaced in a timely manner.
Clean the inner wall of the quartz tube, remove residues and stains, and ensure the transparency of the quartz tube during the coating process.
Gas supply system inspection:
Check if the gas pipeline connection is tight and if there is any air leakage. If there is any air leakage, it is necessary to tighten or replace the sealing components in a timely manner.
Regularly check the working status of pneumatic components such as gas pressure reducing valves and flow meters to ensure their accuracy and reliability.
Clean the gas filter to prevent impurities from entering the reaction chamber and affecting the coating quality.

3. Lubrication and fastening
Lubrication:
Regularly lubricate the moving parts in the equipment, such as bearings and transmission mechanisms of vacuum pumps, to reduce wear and noise.
Use specialized lubricating oil or grease to lubricate according to the requirements of the equipment manual.
Fastening:
Regularly check whether the bolts, nuts, and other fasteners in the equipment are loose. If there is any looseness, it should be tightened in a timely manner to prevent vibration or displacement of the equipment during operation.

4. Electrical system inspection
Power check:
Regularly check whether the power cords, plugs, and sockets of the equipment are intact and undamaged, and whether there are any signs of damage or aging. If there is any abnormality, it needs to be replaced in a timely manner.
Use a multimeter or other tools to check if the power supply voltage is stable and ensure that the equipment operates within the normal voltage range.
Control system inspection:
Check if the control system of the equipment (such as touch panel, PLC, etc.) is working properly. Observe whether the indicator lights, display screens, etc. are displaying normally, and whether the buttons are sensitive and reliable.
Regularly calibrate and debug the control system to ensure accurate and error free parameter settings of the equipment.

5. Safety device inspection
Overload protection:
Check if the overload protection devices of the equipment (such as thermal relays, circuit breakers, etc.) are working properly. By simulating overload situations, observe whether the protective device can cut off the power supply in a timely manner to protect the equipment from damage.
Leakage protection:
Use a leakage protector tester to check whether the leakage protection device of the equipment is sensitive and reliable. Ensure that the leakage protection device can quickly cut off the power supply in case of equipment leakage, ensuring the safety of operators.
Emergency stop button:
Regularly check whether the emergency stop button of the equipment is working properly. After pressing the emergency stop button, observe whether the equipment can immediately stop running and whether each component can quickly return to a safe state.

6. Record and Report
Maintenance records:
Establish equipment maintenance records, recording information such as the time, content, and replaced parts of each maintenance. This helps track the maintenance history of the equipment and promptly identify potential issues with the equipment.
Exception report:
During the maintenance process, if any abnormal conditions are found in the equipment (such as component damage, performance degradation, etc.), it is necessary to report to the higher authorities in a timely manner and take corresponding measures. For problems that cannot be solved by oneself, it is necessary to contact the equipment manufacturer or professional maintenance personnel for repair.