Can a vertical tube heat treatment electric furnace be evacuated?

The vertical tube type heat treatment electric furnace can be evacuated, and its vacuuming function combined with atmosphere control capability provides a high-precision and highly flexible solution for material heat treatment. The specific analysis is as follows:

1. Implementation and Principle of Vacuum Extraction Function
The vertical tube type heat treatment electric furnace can quickly evacuate the furnace to a high vacuum degree (usually up to 10 ⁻ Pa or even higher) by equipping it with high-performance vacuum pumps (such as rotary vane pumps, molecular pumps, etc.). Its core design includes:
Vacuum system integration
The vacuum pump is connected to the furnace body through a vacuum pipeline, and vacuum valves and gauges are installed on the pipeline to control the pumping process and monitor the vacuum degree inside the furnace. For example, a 1600 ℃ vertical tube annealing furnace can quickly remove oxygen and other gases from the furnace through an advanced vacuum system, creating an oxygen free or low oxygen environment.
Sealing structure design
Using stainless steel sealed flanges, only one clamp is needed to complete the connection, avoiding potential air leakage caused by bolt sealing and reducing the risk of heating tube damage. Some models are also equipped with touch screen operated vacuum systems, further enhancing operational convenience.

2. The core advantage of vacuum pumping function
Prevent material oxidation
At high temperatures, materials are prone to react with oxygen, leading to oxidation. Removing oxygen from the furnace through vacuum pumping can effectively protect the surface quality of the material. For example, in bright annealing of metals, a vacuum environment can prevent oxidation and discoloration of the metal surface, maintaining the material’s luster.
Reduce atmospheric pollution
A vacuum environment can avoid contamination of materials by the atmosphere inside the furnace, especially suitable for processes that require strict atmosphere, such as semiconductor manufacturing or precision component preparation. For example, in the process of coating crystalline silicon substrates, a vacuum environment can prevent impurity doping and improve the purity of the film.
Improve the quality of heat treatment
In a vacuum environment, the degassing and diffusion reactions during material heat treatment are more complete, which can improve material properties. For example, in ceramic sintering, a vacuum environment can promote tight particle bonding, increase material density and hardness.
Enhance process flexibility
Vacuum tube furnace can be applied to various heat treatment processes such as annealing, quenching, sintering, etc., to meet the needs of different materials and processes. For example, in the preparation of nanomaterials, a vacuum environment can prevent nanoparticle aggregation and maintain material dispersion.

3. Collaborative application of vacuum pumping and atmosphere control
Vertical tubular heat treatment furnaces typically integrate vacuum pumping and atmosphere control functions to meet more complex process requirements
Vacuum atmosphere circulation process
Through the circulation operation of vacuuming and filling inert gases (such as nitrogen and argon), residual oxygen in the furnace can be further eliminated, and the purity of the atmosphere can be improved. For example, in the preparation of lithium-ion positive electrode materials, first evacuate the air and then fill it with argon gas for protection, which can prevent the material from oxidizing at high temperatures.
Vacuum treatment under specific atmosphere
Some processes require vacuum treatment in a specific atmosphere. For example, in metal diffusion welding, surface oxides are first removed by vacuuming, and then hydrogen gas is injected for reduction reaction, which can improve the welding quality.
Dual temperature zone independent control
The high-end vertical furnace supports a dual temperature zone design, where each temperature zone can independently set temperature and atmosphere parameters. For example, hydrogen gas is introduced into the bottom temperature zone for reduction reaction, and nitrogen gas is introduced into the top temperature zone for protection, achieving synergistic treatment of different process conditions within the same furnace.

4. Typical application scenarios
Semiconductor Manufacturing
In the preparation of integrated circuits, optoelectronic devices, etc., a vacuum environment can prevent materials from being oxidized and contaminated, improving device performance and reliability. For example, in CVD experiments, a vacuum environment can ensure uniform deposition of chemical gases on the substrate surface, forming high-quality thin films.
Preparation of new energy materials
In the fields of lithium batteries, photovoltaics, etc., vacuum tube furnaces are used to prepare high-purity materials. For example, in the preparation of lithium iron phosphate materials, the vacuum environment can adjust the oxygen partial pressure inside the furnace, optimize the lattice parameters of the material, and improve the electrochemical performance.
Metal heat treatment
In fields such as aerospace and automotive manufacturing, vacuum tube furnaces are used for processes such as bright annealing and vacuum quenching of metals. For example, in the annealing of titanium alloys, a vacuum environment can prevent hydrogen embrittlement and promote grain refinement.
Ceramic and glass processing
In the preparation of bioceramics, electronic ceramics, etc., vacuum environment can improve material density and hardness. For example, in the sintering of alumina ceramics, a vacuum environment can promote tight particle bonding and reduce porosity.