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Advantages of tube muffle furnace

Time:2025-09-12 Click:0
  

The tubular muffle furnace combines the heating principles of a tubular furnace and a muffle furnace, demonstrating significant advantages in high-temperature experiments and industrial production. Its core advantages can be elaborated in detail from six dimensions: temperature control, atmosphere regulation, sample protection, application flexibility, energy-saving efficiency, and safety design.

1. Accurate temperature control and high experimental reproducibility
High precision temperature control system
Adopting PID (Proportional Integral Derivative) controller, combined with N-type or S-type thermocouple (accuracy ± 1 ℃), to achieve fast response and stable temperature control.
Typical case: In the semiconductor doping process, temperature fluctuations need to be controlled within ± 5 ℃. The tube type muffle furnace can ensure the uniformity of doping concentration and improve device performance consistency.
Partition temperature control and programmed temperature rise
Multi stage heating zone design (such as zone 3 and zone 5) can independently adjust the temperature of each zone, forming a temperature gradient to meet complex process requirements (such as staged heating, insulation, and cooling).
Application scenario: In chemical vapor deposition (CVD), it is necessary to first raise the temperature to the reaction temperature, then maintain the temperature to complete the film growth, and finally cool down to prevent material cracking.
Uniform furnace structure
The tubular furnace is equipped with a hot air circulation system (such as a built-in fan) to force air flow, eliminate temperature blind spots, and ensure uniform heating of the sample.
Data comparison: The traditional box type muffle furnace has a temperature uniformity of ± 10 ℃, while the tube furnace can reach within ± 5 ℃, significantly improving experimental reliability.

2. Flexible atmosphere adjustment, adaptable to diverse reaction environments
Ability to create vacuum environment
It can be connected to a mechanical pump or a high vacuum pump to adjust the vacuum degree inside the furnace from 10 ⁻³ Pa (ordinary vacuum) to 10 ⁻⁴ Pa (high vacuum).
Core values: prevent sample oxidation (such as metal annealing), remove surface adsorbed gases (such as pre-treatment for material thermogravimetric analysis), or create anaerobic reaction conditions (such as carbon nanotube synthesis).
Gas inlet and mixing control
Support inert gases (N ₂ Ar)、 The introduction of reducing gas (H ₂), oxidizing gas (O ₂) or mixed gas, with flow rate precisely controlled by a mass flow meter (MFC) (accuracy ± 0.1% FS).
Typical applications:
CVD process: Methane (carbon source) and hydrogen (carrier gas) are introduced to deposit graphene films at 800 ℃.
Catalyst activation: Reduce Pt/Al ₂ O3 catalyst in H ₂ atmosphere to enhance catalytic activity.
Excellent atmosphere sealing performance
The two ends of the furnace tube adopt flange sealing structure, matched with O-ring or metal sealing gasket, to ensure low gas leakage rate and meet the requirements of high-purity experiments.

3. Sample isolation and protection to reduce cross contamination
Design of tubular furnace
The sample is placed in a constant temperature zone inside a quartz or corundum tube, physically isolated from heating elements such as silicon carbon rods and silicon molybdenum rods, to avoid contamination caused by direct contact (such as metal element diffusion).
Comparative advantage: In traditional box type muffle furnaces, the distance between the sample and the heating wire is close, which makes it easy to introduce impurities, while tube furnaces can achieve “zero pollution” heating.
Corrosion resistant furnace tube material
Quartz tubes (temperature resistance of 1200 ℃) and corundum tubes (temperature resistance of 1800 ℃) have excellent chemical stability, can withstand acidic/alkaline gas corrosion, and extend equipment life.
Application scenario: When dealing with materials containing corrosive gases such as sulfur and chlorine, there is no risk of corrosion in the furnace tube, ensuring experimental safety.

4. Widely applicable scenarios, covering the needs of multiple industries
Materials Science
Sintering ceramics (such as Al ₂ O ∝, Si ∝ N ₄), synthesizing nanomaterials (such as ZnO nanowires), and preparing composite materials (such as carbon fiber reinforced metal matrix composites).
Metallurgy and Heat Treatment
Vacuum annealing (such as aviation bearing steel), atmosphere quenching (such as mold steel), carburizing/nitriding treatment (such as automotive gears).
Semiconductors and Electronics
Wafer diffusion (such as phosphorus and boron doping), electronic ceramic sintering (such as PZT piezoelectric ceramics), and preparation of thin film solar cells (such as CIGS and perovskite).
Chemical Industry and New Energy
Catalyst activation (such as Pt/C fuel cell catalyst), lithium-ion battery material processing (such as LiCoO ₂ positive electrode sintering), and solar cell material synthesis (such as CVD deposition of Si thin film).

5. Energy saving and efficient design, reducing operating costs
Efficient insulation layer
The outer layer of the furnace is wrapped with ceramic fiber or aluminum silicate fiber insulation material, which has low thermal conductivity, reduces heat loss, and increases the heating rate.
Energy consumption comparison: When processing the same sample, the power consumption of a tube furnace is lower than that of a traditional box furnace.
Intelligent sleep mode
Equipped with automatic standby function, the heating power will be automatically reduced to the insulation state after the experiment is completed, avoiding energy waste caused by repeated start stop.

6. Complete safety protection to ensure operational safety
Multiple over temperature protection
The main temperature control sensor and backup sensor are monitored in dual channels. When the temperature exceeds the limit, the power supply will be automatically cut off and an audible and visual alarm will be triggered to prevent equipment damage or fire.
Gas leakage detection
Integrated hydrogen gas sensor or combustible gas alarm, real-time monitoring of gas concentration in the furnace, automatic shutdown of gas source and ventilation when exceeding the standard.
Explosion proof structural design
Both ends of the furnace tube are equipped with pressure relief valves or explosion-proof membranes to release internal pressure in extreme situations and avoid the risk of explosion.

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