Can a multi zone rotating electric furnace be evacuated for experiments?

Experimental multi zone rotating electric furnaces can usually be evacuated, but whether they support the vacuuming function depends on the equipment model and design configuration. The following will explain the technical principles, equipment types, application scenarios, and operational precautions:

1. Technical principle supports vacuum pumping
The core design of the experimental multi zone rotating electric furnace includes a heating system, a rotating mechanism, and a furnace structure. Some high-end models will integrate a vacuum system (such as mechanical pumps, molecular pumps, vacuum valves, vacuum gauges, etc.). Its working principle is:
Vacuum environment creation: By using a vacuum pump to extract air from the furnace, a low-pressure or high vacuum environment is formed (pressure can be as low as 10 ⁻ Pa or below).
Temperature control: The multi zone independent temperature control system can achieve gradient heating, while the rotating mechanism ensures uniform heating of the material.
Atmosphere isolation: A vacuum environment can prevent material oxidation, volatilization, or reaction with components in the air, while also avoiding adhesion between materials and furnace walls at high temperatures.

2. Types of equipment that support vacuum pumping
According to the configuration of the vacuum system, the experimental multi zone rotary electric furnace can be divided into the following two categories:
Standard multi zone rotary electric furnace:
Configuration: Only has heating and rotating functions, no vacuum system.
Application: Suitable for conventional sintering, heat treatment and other processes, without the need for a vacuum environment.
Vacuum type multi temperature zone rotary electric furnace:
Configuration: Integrated vacuum system based on standard model, including vacuum pump, vacuum valve, vacuum gauge, etc.
Application: Suitable for processes that require vacuum or protective atmosphere, such as vacuum sintering, vacuum heat treatment, chemical vapor deposition (CVD), etc.

3. Application scenarios of vacuum pumping function
Vacuum sintering:
Principle: Heating powder or granular materials in a vacuum environment promotes bonding between particles while avoiding oxidation and impurity introduction.
Advantages: Improve material density, purity, and performance, suitable for ceramics, metals, composite materials, etc.
Case: Vacuum sintering of alumina ceramics, with a density of over 99% of the theoretical value.
Vacuum heat treatment:
Principle: Annealing, quenching, tempering and other treatments are carried out on metals in a vacuum environment to eliminate internal stress and improve the microstructure.
Advantages: Avoiding metal oxidation and decarburization, improving surface quality and mechanical properties.
Case: High speed steel vacuum quenching improves hardness.
Chemical Vapor Deposition (CVD):
Principle: Deposition of a thin film on the surface of a substrate through gas-phase chemical reactions in a vacuum environment.
Advantages: Control film thickness, composition, and structure, suitable for semiconductor, optical, coating, and other fields.
Case: Deposition of silicon nitride film on silicon substrate results in better thickness uniformity.
Material degassing treatment:
Principle: Heating materials in a vacuum environment to remove adsorbed gases and volatile impurities.
Advantages: Improve material purity and performance, suitable for metals, ceramics, polymer materials, etc.
Case: Vacuum degassing of metal powder reduces oxygen content.

4. Operation precautions
Equipment selection:
Select the model that supports vacuum pumping according to the process requirements, confirm the vacuum degree range (such as low vacuum, high vacuum) and pumping rate.
Vacuum system maintenance:
Regularly check the oil level and quality of the vacuum pump, and replace aging seals (such as O-rings and flange gaskets).
Clean vacuum valves and pipelines to avoid blockages or leaks.
Leakage detection:
Use a helium mass spectrometer leak detector or soapy water to check for leaks in the furnace, flanges, valves, and other parts.
The leakage rate should be lower than the specified value of the equipment.
Safe operation:
Before vacuuming, ensure that there are no flammable or explosive materials in the furnace to avoid damage or explosion of the vacuum pump.
Monitor the change in vacuum degree during the heating process. If the vacuum degree decreases, stop heating immediately and investigate the cause.
Process matching:
Select appropriate vacuum degree and heating temperature based on material characteristics to avoid material volatilization or decomposition.
For example, certain metals may evaporate at high temperatures, and vacuum control or local inflation protection is required.