Quartz tube furnaces are widely used in scientific research and industrial fields due to their high temperature stability, chemical inertness, and transparent observation windows. The following are its main application scenarios and specific cases:
1. Materials Science Research
Nanomaterial synthesis
Application: Synthesis of nanomaterials such as carbon nanotubes, graphene, quantum dots, etc.
Case: Using chemical vapor deposition (CVD) technology, methane or acetylene is decomposed at high temperature inside a quartz tube, and carbon nanotube arrays are grown on a substrate. The transparency of quartz tubes allows for real-time observation of the sedimentation process.
Metal alloy treatment
Application: Annealing, quenching, or homogenization treatment of metal alloys.
Case: Vacuum annealing of titanium alloy to eliminate processing stress, and vacuum environment of quartz tube to prevent oxidation.
2. Semiconductor and Electronics Industry
Crystal growth
Application: Growing semiconductor materials such as monocrystalline silicon and gallium arsenide (GaAs).
Case: Czochralski method is used to grow single crystal silicon in a quartz crucible, and a quartz tube furnace provides precise temperature gradient control.
thin film deposition
Application: Preparation of insulation layer, conductive layer or photoresist layer by CVD.
Case: Deposition of silicon nitride film inside a quartz tube as a passivation layer for integrated circuits.
Device Packaging
Application: Packaging sensors, power devices, etc., requiring a high-temperature oxygen free environment.
Case: When packaging MEMS sensors, a quartz tube furnace provides inert gas protection to prevent metal electrode oxidation.
3. In the field of new energy
Preparation of lithium-ion battery materials
Application: Sintering positive electrode materials (such as lithium iron phosphate, ternary materials) or negative electrode materials (such as graphite).
Case: Sintering lithium iron phosphate at 750 ℃ ensures the corrosion resistance of the quartz tube and the purity of the material.
Production of solar cells
Application: Preparation of silicon-based thin-film solar cells or perovskite solar cells.
Case: Deposition of amorphous silicon thin film in quartz tube by CVD, the transparency of quartz tube facilitates monitoring of deposition thickness.
Fuel cell component processing
Application: Sintering the electrolyte layer or electrode of solid oxide fuel cells (SOFCs).
4. Chemistry and Catalysis Research
Catalyst preparation
Application: Synthesis of metal oxide catalysts (such as titanium dioxide, zinc oxide) or supported catalysts.
Case: Loading platinum nanoparticles onto alumina support by immersion method inside a quartz tube, the chemical inertness of the quartz tube prevents catalyst contamination.
Research on High Temperature Reactions
Application: Study chemical reaction kinetics or thermal decomposition processes at high temperatures.
Case: Decomposing methane to produce hydrogen at 1000 ℃, the transparency of the quartz tube allows for in-situ Raman spectroscopy analysis.
Gas adsorption and desorption
Application: Test the adsorption performance of materials for gases such as CO ₂ and H ₂.
Case: Conducting temperature programmed desorption (TPD) experiments inside a quartz tube, with the inert environment of the quartz tube ensuring data accuracy.
5. Biomedical field
Biological material processing
Application: Sintering bioceramics (such as hydroxyapatite) or preparing drug carriers.
Case: Sintering hydroxyapatite scaffold at 1200 ℃, chemical stability of quartz tube to prevent impurity introduction.
Disinfection of medical devices
Application: High temperature dry heat sterilization of surgical instruments or implants.
Case: Stainless steel instruments were sterilized by dry heat at 180 ℃, and the temperature resistance of the quartz tube met the disinfection requirements.
6. Other industrial applications
Optical component processing
Application: Annealing optical glass or preparing fluorescent materials.
Case: Annealing quartz fiber preform at 600 ℃ to eliminate internal stress.
Jewelry and precious metal processing
Application: Annealing precious metal jewelry such as gold and silver, or welding precision components.
Case: Annealing a gold necklace at 800 ℃, the inert environment of the quartz tube prevents oxidation and discoloration.
7. The core advantages of quartz tube furnace
High temperature stability: 1200 ℃ under atmospheric conditions and 1000 ℃ under vacuum conditions, meeting most high-temperature process requirements.
Chemical inertness: Except for HF, it does not react with acids or bases to ensure material purity.
Transparent observation window: Real time monitoring of the reaction process, facilitating adjustment of process parameters.
Fast temperature rise and fall: Some models support a heating rate of 30 ℃/min to improve experimental efficiency.
Modular design: configurable with multiple temperature zones, rotating systems, or gas mass flow meters (MFCs) to adapt to complex processes.