Application industry of laboratory tubular PECVD electric furnace

The laboratory tubular PECVD electric furnace is widely used in various industries such as semiconductors, optoelectronics, consumer electronics, automotive electronics, photovoltaics, industrial control, medicine, military industry, energy, scientific research and education due to its unique advantages of low-temperature deposition, high uniformity, and high adhesion. The specific applications are as follows:

1. Semiconductor industry
Thin film deposition: Deposition of insulation layers (such as SiO ₂, Si ∝ N ₄), passivation layers, and low-k dielectric materials to enhance device performance and stability.
Optoelectronic devices: key components for preparing silicon-based optoelectronic devices such as optical waveguides and gratings.
Integrated circuit manufacturing: Deposition of gate oxide and field oxide layers in CMOS devices to reduce interconnect capacitance effects.
2. Optoelectronic industry
Optical coating: produces anti reflective films, anti reflective films, etc., applied to sunglasses, colored optical equipment, and photometers to improve optical performance and service life.
Display technology: Deposition of transparent conductive thin films (such as ZnO) for LED display modules and lighting beads.
3. Consumer electronics industry
Equipment protection: Provides complete machine hydrophobic and stain resistant protection for smartphones, tablets, laptops, etc., as well as waterproof and corrosion-resistant components and motherboards.
Wear resistant and fingerprint resistant: Apply wear-resistant and fingerprint resistant coatings to the display screen and casing to enhance the user experience.
Wearable devices: Enhance the waterproof, stain resistant, and antibacterial performance of smartwatches and fitness trackers.
4. Automotive electronics industry
Protection of key components: provide anti-corrosion and anti-aging protection for battery management system (BMS), on-board sensors, lamp lens, etc.
Interior protection: Improve the wear resistance and weather resistance of automotive interior parts.
5. Photovoltaic industry
Solar cells: Deposition of key materials such as anti reflective films and transparent conductive films to improve photoelectric conversion efficiency.
Photovoltaic module protection: Provides anti-corrosion, waterproof, and moisture-proof protection, extending the lifespan of the module.
6. Industrial Control and IoT Industry
Equipment protection: Enhance the waterproof and dustproof performance of devices such as PLC, SCADA systems, sensors, and actuators.
Corrosion resistance: Improve the corrosion resistance of electronic components in harsh environments.
7. Medical field
Surface modification of medical devices: Deposition of biocompatible thin film materials for artificial joints, dental implants, etc., to improve antibacterial, stain resistant performance and service life.
Cardiovascular disease treatment: Manufacturing biocompatible film materials to assist in the treatment of cardiovascular diseases.
8. Military equipment industry
Electronic equipment protection: providing circuit boards and surface protection for electronic equipment, sensors, communication devices in the fields of aerospace, ships, weapons, etc., to resist harsh weather and corrosive environments.
Improve durability: Enhance the reliability, safety, and combat effectiveness of the equipment.
9. Energy and Packaging Industry
Food packaging: producing packaging materials with good barrier properties, such as potato chip bags, to extend the shelf life of food.
High temperature experimental support: used for research experiments such as high-temperature atmosphere sintering, atmosphere reduction, vacuum annealing, etc., supporting research in the fields of materials science and engineering.
10. Research and Education Fields
Materials Science Research: Support the study of thin film growth mechanisms, optimization of process parameters, and reliability testing.
Preparation of nanomaterials: synthesis of nanoparticles, nanowires, etc. for use in nanoelectronics and nanomedicine research.
Research on two-dimensional materials and topological insulators: Preparation of two-dimensional materials such as hexagonal boron nitride and transition metal sulfides, as well as topological insulators such as bismuth antimony tellurium, to explore new quantum effects.