Application of laboratory tubular PECVD electric furnace in the new energy industry

The laboratory tubular PECVD electric furnace is widely and crucially used in the new energy industry, mainly reflected in various aspects such as solar cells, fuel cells, energy storage materials, research and development of new energy materials, and recycling and processing. The following is a detailed explanation of its specific applications:

1. In the field of solar cells
Thin film deposition: The tubular PECVD electric furnace uses plasma enhanced chemical vapor deposition technology to prepare high-quality thin films at low temperatures. In solar cells, it is mainly used for depositing anti reflective films (such as silicon nitride SiNx thin films) and transparent conductive films (such as zinc oxide ZnO thin films). These films can significantly improve the photoelectric conversion efficiency by adjusting the plasma parameters to control the refractive quality of the optical coating.
Passivation effect: The hydrogen element in SiNx thin film can passivate lattice defects on the silicon surface, reduce carrier recombination, and further improve battery performance.

2. Fuel cell field
Catalyst synthesis: The tubular PECVD electric furnace can create specific reaction conditions to promote the synthesis and activity enhancement of fuel cell catalysts. By precisely controlling the temperature, atmosphere, and reaction time, the composition and structure of the catalyst can be optimized, thereby improving its catalytic performance.
Electrode material processing: In addition to catalysts, tubular PECVD electric furnaces can also be used for the processing of fuel cell electrode materials, such as annealing, carburizing, and other processes, to improve the electrical properties and stability of the materials.

3. Energy storage materials field
Preparation of lithium battery materials: In the preparation process of positive and negative electrode materials for lithium batteries, a tubular PECVD electric furnace can rapidly synthesize positive electrode materials through high-temperature thermal shock strategy. This strategy not only has low energy consumption and time consumption, but also can synthesize materials with excellent battery performance.
Material modification: The tubular PECVD electric furnace can also be used for surface modification of energy storage materials, such as depositing hard coatings or functional films, to improve the material’s wear resistance, corrosion resistance, and other properties.

4. Research and recycling of new energy materials
New material research and development: In the research and development process of new energy materials, the tubular PECVD electric furnace serves as an important experimental equipment to support the research and development of new materials and processes. It can provide precise high-temperature processing environment and improve experimental efficiency and safety through diversified atmosphere control and intelligent operation.
Recycling of waste batteries: In the heat treatment process of waste lithium-ion batteries, tubular PECVD electric furnaces also play an important role. Through heat treatment technology, valuable metals in waste batteries can be effectively recovered, and pollutants can be treated at the source to achieve clean production.