Can laboratory tubular PECVD electric furnace have multiple temperature zones?

The laboratory tubular PECVD electric furnace can be designed with multiple temperature zones, which can meet complex process requirements and improve the uniformity and quality of thin film deposition. The following is a detailed explanation of multi temperature zone design:

1. The necessity of multi temperature zone design
Temperature gradient control:
In PECVD process, different materials or deposition stages may require different temperature conditions. The multi temperature zone design allows for the establishment of multiple independent temperature control zones within the furnace tube, with each zone capable of independently adjusting temperature to meet the requirements of complex processes.
For example, when depositing multiple layers of thin films, each layer may require different deposition temperatures. Multi temperature zone design can ensure that each layer of thin film is deposited at the optimal temperature, improving the quality and performance of the film.
Improve film uniformity:
Uneven temperature distribution inside the furnace tube can lead to uneven thickness or composition of the film, affecting its performance. Multi temperature zone design can reduce the temperature gradient inside the furnace tube and improve the uniformity of the film by optimizing the temperature distribution.
For example, in the photovoltaic industry, if the temperature difference within the silicon wafer surface is greater than 2 ℃, it will cause a deviation in film thickness of more than 5%, directly resulting in a loss of 0.2-0.5 percentage points in battery conversion efficiency. Multi temperature zone design can effectively control the in-plane temperature difference, improve the uniformity of the film, and enhance the battery conversion efficiency.

2. Implementation method of multi temperature zone design
Partition heating technology:
Divide the furnace tube into multiple heating zones, each equipped with independent heating elements and temperature sensors.
Through the intelligent temperature control system, the temperature of each heating area can be independently controlled, achieving precise adjustment of temperature gradient.
Dynamic compensation algorithm:
Adopting advanced dynamic compensation algorithms, the heating power is automatically adjusted based on real-time collected temperature data to maintain temperature stability in each temperature zone.
This algorithm can quickly respond to temperature changes, ensuring the uniformity and stability of temperature distribution inside the furnace tube.
High precision temperature control system:
Equipped with high-precision temperature sensors and PID controllers, achieving temperature control accuracy of ± 1 ℃ or even higher.
Support multiple programmable temperature curve settings to meet the requirements of complex processes.

3. Practical application of multi temperature zone design
Photovoltaic industry:
In solar cell manufacturing, multi temperature zone PECVD electric furnaces can be used to deposit key thin film materials such as anti reflection films and passivation films.
By precisely controlling the temperature of each temperature zone, the deposition process of the thin film can be optimized, and the photoelectric conversion efficiency and stability of the battery can be improved.
Semiconductor industry:
In semiconductor device manufacturing, multi temperature zone PECVD electric furnaces can be used to deposit thin film materials such as insulation layers and passivation layers.
Multi temperature zone design can meet the different requirements of thin film performance for different devices, improving the reliability and performance of the devices.
Research field:
In the fields of materials science research, nanotechnology, etc., multi temperature zone PECVD electric furnaces can be used to explore the preparation process and properties of new thin film materials.
By flexibly adjusting the temperature parameters of each temperature zone, the growth mechanism and performance changes of thin films under different temperature conditions can be studied.