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1200¡æ RTP tube furnace

1200¡æ RTP tube furnace

Model:KJ-1200 RTP
Description:1200¡æ RTP tube furnace adopts international advanced manufacturing technology, modelling is novel and reasonable structure; Has been all kinds of the validation sample experiments, and has been widely used in semiconductor device research and development and production, etc

Features of 1200¡æ RTP tube furnace:

1. Operation Temperature: 1100¡æ,(1200¡æ for short time);
2. Maximum energy efficiency is achieved by surrounding the chamber with thermal-efficient alumina fiber ceramic insulation.
3. Heavy duty double layer structure with cooling fan. Lower temperature in outside case.
4. Max. heating rate > 50°C/s  and cooling rate  > 10°C/s
5. Can be used for graphene-growing or CVD system for the experiment for the RTP requirement.
6. PID automatic control via current limiting phase angle fired the resistor, e.g. SCR(Silicon Controlled Rectifier).
7. Power control with 30 segments programmable.
8. Vacuum, in reducibility or protective atmosphere.

Power  KW 3
 Voltage  V  AC 208-240V Single Phase,50/60 Hz
  Max.   Temperature  °C 1200(1 hour)
 Work  Temperature  °C  1100
Max Heating&cooling
 °C/S ≤10
 Tube Size  mm High purity  quartz pipe Φ80×1400
 Heating zone Length  mm  440
 Constant Temp. zone Length mm 200±1°C
  30 programmable segments for precise control of heating rate, cooling rate and dwell time.
Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
Over temperature protection and alarm allows for operation without attendant(s).
+/- 1 ºC temperature accuracy.
RS485 Communications Port.
 Accuracy  °C  ±1
Standard Accessory Special tube 1pcs,SS sealing flange 1set,Sealing Realing 2set ,High-temperature glove1pair, Crucible hook one pcs 
 Adopted Accessory quartz block,quartz crucible, and quartz hook
    Size  mm  550×380×600 mm(furnace)
 1500×380×620 mm(furnace+track)
    Packing dimension  mm  1550×530×810(Woody Package)
     Net weight  Kg  90
     Gross Weight  Kg  130

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