Outstanding features of CVD grown graphene furnace :
1.Open tube furnace
2.To be input inert gas, hydrocarbon gas,hydrogen.
3.Max. Temperature 1200C
It is a tube furnace with quartz tube or alumina tube, vacuum pump and flow meters gas flowing system. It can mix different types of gases for CVD or diffusion.
Technical parameters of CVD grown graphene furnace :
Model |
CVD grown graphene furnace |
Control system |
Intelligent temperature control system |
Display mode |
Digital tube display(LED) |
Limiting temperature |
1200℃ |
Working temperature |
≤1150℃ |
Heating rate |
≤20℃(suggestion:10℃/min) |
Heating element |
Aludirome |
Heating zone |
Single |
Heating zone length |
400mm(Can be customized according to customer needs) |
Furnace tube material |
Quartz tube |
furnace tube diameter |
80mm(Can be customized according to customer needs) |
The furnace tube length |
1000mm(Can be customized according to customer needs) |
Gas tightness |
Vacuum flange and corundum furnace tube up to4.03×10-3Pa |
Control mode |
PID Temperature control |
Temperature accuracy |
±1℃ |
Thermal Couple |
N Type |
The flow meter |
Float flowmeter |
Pneumatic pressure |
-0.1~0.15 MPa |
Warranty |
12 month (exclusive wearing part) |
CVD grown graphene furnace can be customized according to customers’requirements.