1100 ℃ tubular vacuum CVD electric furnace

This tube type vacuum CVD tube furnace is widely used for sintering, coating, nanotube research, brazing, annealing and other experiments of samples under vacuum and atmosphere conditions. It is suitable for scientific research and experiments on CVD process in universities, research institutions, laboratories and industrial and mining enterprises.

1100 ℃ tubular vacuum CVD electric furnace actual shooting

1. Double layer shell opening structure: The double layer shell opening structure is convenient for taking and placing furnace tubes, equipped with an air cooling system, and the temperature of the furnace shell is kept within a safe range.
2. LCD touch screen operating system: Adopting the LCD touch screen operating system, the operation is convenient and fast, and the data can be stored and output through EXCEL.
3. Excellent dynamic sealing system: A silicone O-ring is used for compression sealing between the furnace tube and the flange, which is easy to remove and has strong sealing performance, allowing the equipment to maintain an atmospheric state during rotation.

Model			PT-TCVD1100-S100CK1
Part I: Tube Furnace
PT-TCVD1100-S100CK1  CVD tube furnace	Display		LCD touch screen easy to operate
	Furnace Structure		•Double-layer steel structure with air cooling. •High purity Al2O3 fibrous insulation with Max. energy saving.
	Max. Temperature		1200℃ for short time
	Working Temperature		≤1100°C ( continuous)
	Heating Rate		0~20℃/min，≤10℃/min recommended
	Heating Zone Length		300mm(Can be customized according to customer needs)
	Heating Element		Resistance wire with mo
	Tube Material		High purity quartz
	Thermal Couples		N type
	Temperature Control Accuracy		±1℃
	Tube Size		1 qty	High purity quartz tube Outer diameter: 100mm
	Temperature Control		•LCD touch screen control with 16 temperature curves can be saved,each temperature curve can be automatically set with 30 steps programmable. •PID automatic control via SCR power control. •Built-in Over Temperature and Thermocouple Failure Protection.
	Vacuum Flange		Stainless Steel vacuum flange with valve
Part II: Vacuum system
High Vacuum diffusion Pump Set		Rotary vane pump,Diffusion pump system Ultimate vacuum:  0.0001 mbar
Water chiller		CW5200 water chiller to cool the pumps
Vacuum gauge		Resistance vacuum gauge Ionization vacuum gauge
Part III: Float flowmeter
Float flowmeter	Standard flow range: 10-100ml/min for gas (Final flow range is based on customer’s requirement)
Pressure Gauge	Mechanical pressure gauge (-0.1Mpa to 0.15Mpa)
Warranty	One year limited warranty (Consumable parts such as heating elements and  tube are not covered by the warranty) with lifetime support .

Actual photo of 1100 ℃ tubular vacuum CVD electric furnace

Actual photo of 1100 ℃ tubular vacuum CVD electric furnace