3-temperature zone tube CVD system_Zhengzhou Kejia Furnace

Product Introduction:

KJ-TCVD1600-L80LB3 is a three temperature zone tube furnace CVD system. The diameter of the furnace tube is 80mm. The vacuum pump adopts a dual rotating mechanical pump, and the gas mixing system is a 4-way mass gas mixing system. The working temperature of the furnace can reach 1600 ℃ and the vacuum degree can reach 10pa. It belongs to a type of CVD system.

Actual photo of the 3-temperature zone tube CVD system

Main product advantages:

1. The heating element is made of high-quality MoSi2, and the furnace is made of ceramic fiber material, which has good thermal insulation performance, durability, high tensile strength, no miscellaneous balls, high purity, and energy-saving effect is obviously better than that of domestic fiber materials.
2. Over temperature alarm and power off, leakage protection, safe and reliable operation.
3. Independent temperature controller. 30-level programmable temperature.

The main technical parameters:

Heating System(Tube Furnace)
Max. temperature	1700 ℃
Working temperature	1600℃
Display	LED display
Tube size	80mm(OD)(Can be customized according to customer needs)
Tube Material	High Quality alumina tube
Hot zone length	220+220+220mm(There will be a gap between each zones)(Can be customized according to customer needs)
Heating Element	MoSi2
Heating rate	0-5℃/min
Temperature control	● PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. ● 30 programmable segments for precise control of heating rate, cooling rate and dwell time. ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. ● Over temperature protection and alarm allows for operation without attendant.
Thermocouple	3pcs thermocouple(Both measurement & temperature control function) located in the middle of the each hot zones(out side the tube) 1pcs thermocouple(Only measure the temperature) located inside the tube.
Temperature accuracy	±1℃
Furnace structure	1.Double layer steel casing with dual cooling fan, temperature of furnace shell below 60℃. Non-Splitable door design.
Vacuum Flange	Stainless Steel vacuum flange with valve.
Gas System
4 Channel Mass Flow Meter	Four precision mass flow meters: MFC 1: Gas flow range from 0~100 sccm MFC 2: Control range from 0~200 sccm MFC3: Control range from 0-500sccm MFC4: Control range from 0~200 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing.
Vacuum Pump +Vacuum Gauge System
Vacuum Pump+Vacuum Gauge	Equipped with rotary vane pump which makes the vacuum Rate can reach 10Pa(Cool State)

Actual photo of the 3-temperature zone tube CVD system

Product Display

3-temperature zone tube CVD system