pecvd System

Brief Introduction of pecvd System:  

PECVD is a compact PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 600W RF plasma source, 120mm O.D split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. 
 

Technical Parameter:

Model		KJ-O1200-4CPECVD
Tube Furnace	Display	LED
	Max. Temperature	1200℃
	Continuous Woking Temp.	≤1100℃
	Heating Rate	0~20℃/min
	Temperature Zone length	440mm(Can be customized according to customer needs)
	Accuracy	±1℃
	Tube Size	Ф120mm x 1400mm(Can be customized according to customer needs)
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Matching	Automatic
RF Output Port	50 Ω, N-type, female
Noise	<50 dB.
Cooling	Air cooling.
Ditial Vacuum Gauge	1x10-6 to 1125 Torr measurement range Anti-corrosive, gas-type independent

We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!