Split Tube furnace |
· 1200°C Max. working temperature for < 60 minutes
· 1100°C Max for continuous heating
· High purity quartz tube 2"OD x 1.7"ID x 39.4" Length (Can be customized according to customer needs)
· 30 segments programmable precision digital temperature controller
8" (200mm), single zone. 2.3" (60mm) (Can be customized according to customer needs) |
Plasma RF Generator |
· Matching: Automatic
· RF Output Port: 50 Ω, N-type, female
· Noise: <50 dB.
· Cooling: Air cooling. |
Vacuum Flange and Fittings |
· Vacuum flange set is made of stainless steel 304.
· Left flange assembly includes a KF-25 vacuum port, two KF-25
· quick clamp,
· a KF-25 right angle valve, a KF-25 vacuum bellows, a flange
· support 1/4 O.D
· hose fitting, and a needle valve. |
Vacuum Pump |
· 2 Liter /S or 120 liter/m
Oil trap (inlet) and exhaust filter (outlet) are installed. |
Warranty |
One year limited warranty with lift time support (Consumable parts such
as processing tubes, o-rings and heating elements are not covered
by the warranty, please order the eplacement at related products below.) |