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plasma enhanced chemical vapor deposition (PECVD) tube furnace system

plasma enhanced chemical vapor deposition (PECVD) tube furnace system

Model:

Description:

SplitTubefurnace 1 1200oCMax.workingtemperaturefor60minutes 2 1100oCMaxforcontinuousheating 3 30segmentsprogrammableprecisiondigitaltemperaturecontroller 4 440mmlengthsingleheatingzoneand150mmlengthconstanttemperatezone 5 Highpurityquartzt

Detailed

Split Tube furnace

 

1

1200oC Max. working temperature for < 60 minutes

2

1100oC Max for continuous heating

3

30 segments programmable precision digital temperature controller

4

440 mm length single heating zone and 150 mm length constant temperate zone

5

High purity quartz tube optional from ( click optional bar to choose )

6

3.14"OD x 2.83"ID x 48'' Length

7

One pair of vacuum sealed flange with valves

8

Input power: 208 – 240V AC input, single phase at max. 4KW

 9

 

Plasma RF Power supply

 

1

Output Power:   5 -500W adjustable with ± 1% stability

2

RF frequency:  13.56 MHz ±0.005% stability

3

Reflection Power: 200W max.

4

Matching:   Automatic

5

RF Output Port: 50 Ω, N-type, female

6

Noise: <50 dB. 

7

Cooling:  Air cooling.

8

Power :  208-240VAC, 50/60Hz

9

Note:  This RF power supply can accept 50 - 80 mm Max. quartz tube 

 by changing flange

 10

 

Anti-corrosive 

Pressure Gauge

 

1

3.8x10-5 to 1125 Torr measurement range

2

Anti-corrosive, gas-type independent 

3

High accuracy and reproducibility at atmosphere for reliable atmospheric

 pressure detection

4

Fast atmospheric detection eliminates waiting time and shortens process cycle

5

Easy to exchange plug & play sensor element

 6

 

Vacuum Pump 

and valve

 

1

Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust

 System installed in bottom case with max. vacuum pressure 10-2 torr.

2

 KFD25 adapter and stainless steel pipe are connected between pump and tube 

flange with precision ball valve

3

 Digital vacuum pressure gauge and display are installed with the furnace

 4

 

 4

 

Mass Flow meters

  

 

1

Four precision mass flow meters (0.02% accuracy) with digital display are installed on 

the bottom case to control

 gas flow rate automatically.

2

MFC 1: Gas flow range from 0~100 sccm

3

MFC 2&3: Control range from 0~200 sccm  

4

MFC 4: Control range from 0~500 sccm

5

One gas mixing tank is installed on bottom case with liquid release valve

6

4 stainless steel needle valves is installed on left side of bottom case to 

control 4type gases mixing manually

7

Gas inlet fitting: four 1/4NPS

8

Gas outlet fitting: four 1/4NPS

 9

 


 


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Contact Information

E-mail:
web@kejiafurnace.com
Address:
Room 1505, Building 9, No. 26 Dongqing Street, High-tech Industrial Development Zone, Zhengzhou City, Henan Province
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Tel Number

181-3719-5600

Email

web@kejiafurnace.com

WhatsApp

+86/18037178440

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