High vacuum automatic rotary and tilt PECVD

Model：KJ-PECVD

Description：

Model KJ-PECVD Part I: Standard Parts Tube Furnace Display LCD touch screen Chamber Split type and upper part can be opened Max. Temperature 1200℃for short time Continuous Woking Temp. 1100℃ Heating Rate Suggestion: 0~10℃/min (max. 20℃/min) T

Model		KJ-PECVD
Part I: Standard Parts
Tube Furnace	Display	LCD touch screen
	Chamber	Split type and upper part can be opened
	Max. Temperature	1200℃ for short time
	Continuous Woking Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	400mm
	Heating Element	Resistance wire with Mo
	Thermocouple	K type
	Temperature Control Accuracy	±1℃
	Tube Size	OD60mm x 100mm x 60mm Tube Length :1600 mm
	Tube Size	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Power	220V, 50 Hz, single phase (or according to your requirements)
	Customized Function	Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer.

	Plasma RF Power supply	Output Power	5 -500W adjustable with ± 1% stability
RF frequency		13.56 MHz ±0.005% stability
Reflection Power		200W max.
Matching		Automatic
RF Output Port		50 Ω, N-type, female
Noise		<50 dB.
Cooling		Air cooling.
Power		220V, 50Hz

Product Display

High vacuum automatic rotary and tilt PECVD