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Tel Number
181-3719-5600
Brief Introduction:
KJ-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
KJ-T1600 Touch Screen CVD is a tube furnace with 80mm diameter alumina tube and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
| Model | KJ-T1600 CVD with 3 MFC Gas channels | |
| Tube Furnace | Display |
LCD Touch Screen |
| Max. Temperature | 1600℃ for short time | |
| Continuous Working Temp. | ≤1500℃ | |
| Heating Rate | Suggestion: 0~10℃/min | |
| Temperature Zone | 300mm | |
| Heating Element | MoSi2 Heaters | |
| Thermocouple | B Type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 80x1000mm (OD x L) | |
| Material: Alumina Tube | ||
| Tube Block | Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). | |
| Temperature Control | PID automatic control via SCR power control | |
| Program and Ramps | 30 steps programmable | |
| Vacuum Flange |
Stainless Steel vacuum flange with valves |
|
| Power | 220V, 50 Hz, single phase at max.6KW | |
|
Mass Flow Meters (LCD Touch Screen) |
Three precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2: Gas flow range from 0~200 sccm MFC 3: Gas flow range from 0~200 sccm (Gas flow range can be according to your requirement) One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually  |
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