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Tel Number
181-3719-5600
Brief Introduction:
KJ-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
Technical Parameter:
KJ-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
Technical Parameter:
| Brand | Kejia | |
| Model | KJ-T1200 | |
| Part I: Standard Parts | ||
|
Tube Furnace |
Display | LED type |
| Max. Temp. | 1200℃ for limiting | |
| Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min,max. 15℃/min | |
| Temperature Zone | 300mm + 300mm dual zones | |
| Heating Element | Resistance wire | |
| Thermocouple | K type | |
| Temperature Control Accuracy | ±1℃ () | |
| Tube Size | 60 / 52mmx 1000mm (OD/ID x L) | |
| Material: Quartz tube | ||
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Vacuum Flange |
Stainless Steel vacuum flange. One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.  Another end of the flange has a KF25 port with a barbed needle valve  |
|
| Power | 220V, 50 Hz, single phase at max. 6KW | |
| Vacuum Pump | Rotary Vane Vacuum Pump |
Ultimate vacuum 10-3 Torr. Vacuum inside the tube is around 10-1 Torr. (RM temp. And empty tube condition) Flow rate: 2.6 L/S (pump photo is only for reference, actual appearance depends on final desgin) The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories Digital vacuum gauge is included 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent |
|
Customized Mass Flow Meters (Seven Star Brand) With LCD Touch Screen Controller (Desigen by Kejia with Kejia logo) |
One Float flowmeter + Four precision mass flow meters : MFC Accuracy is: ±1.5% F.S. MFC 1 for Nitrogen : Gas flow range from 0~100 sccm MFC 2 for Hydrogen : Gas flow range from 0~100 sccm MFC 3 for Methan : Gas flow range from 0~100 sccm MFC 4 for Argon: Gas flow range from 0~100 sccm MFC 5 for Oxygen: Gas flow range from 0~100 sccm FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually. LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:  |
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